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Application-specific system technology
Telescopic cylinder system for handling wafers in semiconductor production
Product information
Telescopic cylinder system for handling wafers in semiconductor production
Semiconductors are produced in special coating systems in a high vacuum on silicon wafers. Several thousand semiconductors can be produced simultaneously on a 12″ wafer. The wafers have to be moved several times in the system for the various processes. The telescopic cylinder systems with 180 and 280 mm piston diameters, which are arranged in a circle in the system and are cycled after each process step, are used for this purpose. Lines for the various media required for the process are routed through the piston rods.
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